Adaptive sliding-mode position control for piezo-actuated stage

Xinkai Chen, Takeshi Hisayama

研究成果: Article

140 引用 (Scopus)

抄録

The piezo-actuated stage is composed of a piezoelectric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezoactuated stage is a challenging task. This paper discusses the adaptive sliding mode control for the piezo-actuated stage, where the hysteresis is described by the Prandtl-Ishlinskii model. This paper tries to fuse the hysteresis model with the adaptive control techniques, where the real value of the parameters of the stage need neither be identified nor be measured. The proposed control law ensures the global stability of the controlled piezo-actuated stage, and the position error can be controlled to be as small as required by choosing the design parameters. Experimental results show the effectiveness of the proposed method.

元の言語English
ページ(範囲)3927-3934
ページ数8
ジャーナルIEEE Transactions on Industrial Electronics
55
発行部数11
DOI
出版物ステータスPublished - 2008

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Piezoelectric actuators
Position control
Sliding mode control
Hysteresis
Electric fuses
Friction

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Control and Systems Engineering
  • Computer Science Applications

これを引用

Adaptive sliding-mode position control for piezo-actuated stage. / Chen, Xinkai; Hisayama, Takeshi.

:: IEEE Transactions on Industrial Electronics, 巻 55, 番号 11, 2008, p. 3927-3934.

研究成果: Article

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