抄録
The nano-stage driven by magnetostrictive actuator is composed of a magnetostrictive actuator and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the magnetostrictive actuator and the friction behavior in the PM, the accurate position control of the nano-stage is a challenging task. This paper discusses the high precision control for the magnetostrictive nano-stage, where the hysteresis is described by Preisach model. The proposed control law ensures the zero output tracking of the controlled stage. Experimental results show the effectiveness of the proposed method.
| 元の言語 | English |
|---|---|
| ホスト出版物のタイトル | 2013 IEEE International Conference on Mechatronics and Automation, IEEE ICMA 2013 |
| ページ | 749-754 |
| ページ数 | 6 |
| DOI | |
| 出版物ステータス | Published - 2013 |
| イベント | 2013 10th IEEE International Conference on Mechatronics and Automation, IEEE ICMA 2013 - Takamastu 継続期間: 2013 8 4 → 2013 8 7 |
Other
| Other | 2013 10th IEEE International Conference on Mechatronics and Automation, IEEE ICMA 2013 |
|---|---|
| 市 | Takamastu |
| 期間 | 13/8/4 → 13/8/7 |
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ASJC Scopus subject areas
- Artificial Intelligence
- Electrical and Electronic Engineering
- Mechanical Engineering
これを引用
Advanced control for magnetostrictive actuated nano-stage. / Chen, Xinkai.
2013 IEEE International Conference on Mechatronics and Automation, IEEE ICMA 2013. 2013. p. 749-754 6618010.研究成果: Conference contribution
}
TY - GEN
T1 - Advanced control for magnetostrictive actuated nano-stage
AU - Chen, Xinkai
PY - 2013
Y1 - 2013
N2 - The nano-stage driven by magnetostrictive actuator is composed of a magnetostrictive actuator and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the magnetostrictive actuator and the friction behavior in the PM, the accurate position control of the nano-stage is a challenging task. This paper discusses the high precision control for the magnetostrictive nano-stage, where the hysteresis is described by Preisach model. The proposed control law ensures the zero output tracking of the controlled stage. Experimental results show the effectiveness of the proposed method.
AB - The nano-stage driven by magnetostrictive actuator is composed of a magnetostrictive actuator and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the magnetostrictive actuator and the friction behavior in the PM, the accurate position control of the nano-stage is a challenging task. This paper discusses the high precision control for the magnetostrictive nano-stage, where the hysteresis is described by Preisach model. The proposed control law ensures the zero output tracking of the controlled stage. Experimental results show the effectiveness of the proposed method.
KW - adaptive control
KW - hysteresis
KW - Magnetostrictive actuator
KW - nano stage
KW - Preisach model
UR - http://www.scopus.com/inward/record.url?scp=84887863645&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84887863645&partnerID=8YFLogxK
U2 - 10.1109/ICMA.2013.6618010
DO - 10.1109/ICMA.2013.6618010
M3 - Conference contribution
AN - SCOPUS:84887863645
SN - 9781467355582
SP - 749
EP - 754
BT - 2013 IEEE International Conference on Mechatronics and Automation, IEEE ICMA 2013
ER -