Advanced control for nano-positioner driven by piezo actuator

Xinkai Chen, Chun Yi Su

研究成果: Conference contribution

抜粋

The piezo-actuated stage is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control of the piezo- actuated stage is a challenging task. This paper discusses the high precision adaptive control for the piezo-actuated stage, where the hysteresis is described by Prandtl-Ishlinskii model. Only the parameters which are directly needed in the controller design are estimated. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

元の言語English
ホスト出版物のタイトルProceedings, ICCES'2010 - 2010 International Conference on Computer Engineering and Systems
ページ126-131
ページ数6
DOI
出版物ステータスPublished - 2010 12 1
イベント2010 6th International Conference on Computer Engineering and Systems, ICCES'2010 - Cairo, Egypt
継続期間: 2010 11 302010 12 1

出版物シリーズ

名前Proceedings, ICCES'2010 - 2010 International Conference on Computer Engineering and Systems

Conference

Conference2010 6th International Conference on Computer Engineering and Systems, ICCES'2010
Egypt
Cairo
期間10/11/3010/12/1

ASJC Scopus subject areas

  • Computer Science (miscellaneous)
  • Hardware and Architecture

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  • これを引用

    Chen, X., & Su, C. Y. (2010). Advanced control for nano-positioner driven by piezo actuator. : Proceedings, ICCES'2010 - 2010 International Conference on Computer Engineering and Systems (pp. 126-131). [5674837] (Proceedings, ICCES'2010 - 2010 International Conference on Computer Engineering and Systems). https://doi.org/10.1109/ICCES.2010.5674837