Advanced Metallization for ULSI Applications

Osamu Nakatsuka, Hoo Jeong Lee, Young Bae Park, Kazuyoshi Ueno, Shinji Yokogawa

研究成果: Editorial

元の言語English
記事番号06J001
ジャーナルJapanese Journal of Applied Physics
55
発行部数63
DOI
出版物ステータスPublished - 2016

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

これを引用

Nakatsuka, O., Lee, H. J., Park, Y. B., Ueno, K., & Yokogawa, S. (2016). Advanced Metallization for ULSI Applications. Japanese Journal of Applied Physics, 55(63), [06J001]. https://doi.org/10.7567/JJAP.55.06J001