Advanced Metallization for ULSI Applications

Osamu Nakatsuka, Hoo Jeong Lee, Young Bae Park, Kazuyoshi Ueno, Shinji Yokogawa

研究成果: Editorial › 査読

本文言語	English
論文番号	06J001
ジャーナル	Japanese Journal of Applied Physics
巻	55
号	63
DOI	https://doi.org/10.7567/JJAP.55.06J001
出版ステータス	Published - 2016

ASJC Scopus subject areas

@article{31f3f0a7de85408e851f6c5d3ab7e141,

title = "Advanced Metallization for ULSI Applications",

author = "Osamu Nakatsuka and Lee, {Hoo Jeong} and Park, {Young Bae} and Kazuyoshi Ueno and Shinji Yokogawa",

year = "2016",

doi = "10.7567/JJAP.55.06J001",

language = "English",

volume = "55",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "63",

}

TY - JOUR

T1 - Advanced Metallization for ULSI Applications

AU - Nakatsuka, Osamu

AU - Lee, Hoo Jeong

AU - Park, Young Bae

AU - Ueno, Kazuyoshi

AU - Yokogawa, Shinji

PY - 2016

Y1 - 2016

UR - http://www.scopus.com/inward/record.url?scp=85065701167&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85065701167&partnerID=8YFLogxK

U2 - 10.7567/JJAP.55.06J001

DO - 10.7567/JJAP.55.06J001

M3 - Editorial

AN - SCOPUS:85065701167

SN - 0021-4922

VL - 55

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

IS - 63

M1 - 06J001

ER -