Advanced Metallization for ULSI Applications

Osamu Nakatsuka, Hoo Jeong Lee, Young Bae Park, Kazuyoshi Ueno, Shinji Yokogawa

研究成果: Editorial査読

本文言語English
論文番号06J001
ジャーナルJapanese Journal of Applied Physics
55
63
DOI
出版ステータスPublished - 2016

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

引用スタイル