An infrared imaging method for high-throughput combinatorial investigation of hydrogenation-dehydrogenation and new phase formation of thin films

H. Oguchi, J. Hattrick-Simpers, I. Takeuchi, E. J. Heilweil, L. A. Bendersky

研究成果: Article査読

12 被引用数 (Scopus)

抄録

We have developed an infrared imaging setup enabling in situ infrared images to be acquired, and expanded on capabilities of an infrared imaging as a high-throughput screening technique, determination of a critical thickness of a Pd capping layer which significantly blocks infrared emission from below, enhancement of sensitivity to hydrogenation and dehydrogenation by normalizing raw infrared intensity of a Mg thin film to an inert reference, rapid and systematic screening of hydrogenation and dehydrogenation properties of a Mg-Ni composition spread covered by a thickness gradient Pd capping layer, and detection of formation of a Mg2 Si phase in a Mg thin film on a thermally oxidized Si substrate during annealing.

本文言語English
論文番号073707
ジャーナルReview of Scientific Instruments
80
7
DOI
出版ステータスPublished - 2009

ASJC Scopus subject areas

  • Instrumentation

フィンガープリント 「An infrared imaging method for high-throughput combinatorial investigation of hydrogenation-dehydrogenation and new phase formation of thin films」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル