An Outlier Removal Method for SPC in Semiconductor Manufactureing

Tomoaki Kubo, Masateru Minami, Tetsuya Homma

研究成果: Article › 査読

本文言語	English
ページ（範囲）	292-298
ジャーナル	SICE Journal of Control and Measurement System Integration
巻	3
出版ステータス	Published - 2010 10月 5

引用スタイル

@article{a933fcba7d12439b9a0256ff6bbaba3b,

title = "An Outlier Removal Method for SPC in Semiconductor Manufactureing",

author = "Tomoaki Kubo and Masateru Minami and Tetsuya Homma",

year = "2010",

month = oct,

day = "5",

language = "English",

volume = "3",

pages = "292--298",

journal = "SICE Journal of Control and Measurement System Integration",

}