Anisotropic laser-induced damage threshold and residual stress of TiO 2 sculptured thin films

Xiudi Xiao, Lei Miao, Ming Zhang, Gang Xu, Jianda Shao, Zhengxiu Fan

研究成果: Article査読

3 被引用数 (Scopus)


The residual stress and laser-induced damage threshold (LIDT) of TiO 2 sculptured thin films prepared by glancing angle electron beam evaporation were studied. UV-Vis-NIR spectra and optical interferometer were employed to characterize the optical and mechanical properties, respectively. Optical microscopy and Raman spectra were used to observe damage morphology and analyze damage microstructure, respectively. It was found that the residual stress changed from compressive into tensile with increasing deposition angle. The LIDT was anisotropic with p- and s-polarization light, which was due to the anisotropic nanostructure and optical properties. Simultaneously, an optimum deposition angle for the maximum threshold of TiO2 film was about 60°. The mechanism of laser-induced damage was thermal in nature. The process of thermal damage with crystallization is proved by Raman spectra.

ジャーナルJournal of Nanoscience and Nanotechnology
出版ステータスPublished - 2013 2

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics

フィンガープリント 「Anisotropic laser-induced damage threshold and residual stress of TiO <sub>2</sub> sculptured thin films」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。