Application of scanning confocal electron microscopy to nanomaterials and the improvement in resolution by image processing

X. Zhang, Masaki Takeguchi, Ayako Hashimoto, Kazutaka Mitsuishi, Masayuki Shimojo

研究成果: Conference contribution

抄録

Scanning confocal electron microscopy (SCEM) is a novel technique for three-dimensional observation with a nanometer-scale resolution. Annular dark field (ADF) SCEM imaging has been demonstrated to have better depth resolution than bright field (BF) SCEM imaging. However, the depth resolution of ADF-SCEM images is limited by the vertical probe size determined by spherical aberration and convergence angle. Therefore, we attempted to employ a deconvolution image processing method to improve the depth resolution of SCEM images. The result of the deconvolution process for vertically sliced SCEM images showed the improvement in the depth resolution by 35-40%.

元の言語English
ホスト出版物のタイトルMaterials Science Forum
ページ259-262
ページ数4
675 677
DOI
出版物ステータスPublished - 2011
外部発表Yes
イベント7th International Forum on Advanced Material Science and Technology, IFAMST-7 - Dalian
継続期間: 2010 6 262010 6 28

出版物シリーズ

名前Materials Science Forum
675 677
ISSN(印刷物)02555476

Other

Other7th International Forum on Advanced Material Science and Technology, IFAMST-7
Dalian
期間10/6/2610/6/28

Fingerprint

Confocal microscopy
Nanostructured materials
Electron microscopy
image processing
Image processing
Scanning
scanning electron microscopy
Deconvolution
Imaging techniques
Aberrations
aberration
probes

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

これを引用

Zhang, X., Takeguchi, M., Hashimoto, A., Mitsuishi, K., & Shimojo, M. (2011). Application of scanning confocal electron microscopy to nanomaterials and the improvement in resolution by image processing. : Materials Science Forum (巻 675 677, pp. 259-262). (Materials Science Forum; 巻数 675 677). https://doi.org/10.4028/www.scientific.net/MSF.675-677.259

Application of scanning confocal electron microscopy to nanomaterials and the improvement in resolution by image processing. / Zhang, X.; Takeguchi, Masaki; Hashimoto, Ayako; Mitsuishi, Kazutaka; Shimojo, Masayuki.

Materials Science Forum. 巻 675 677 2011. p. 259-262 (Materials Science Forum; 巻 675 677).

研究成果: Conference contribution

Zhang, X, Takeguchi, M, Hashimoto, A, Mitsuishi, K & Shimojo, M 2011, Application of scanning confocal electron microscopy to nanomaterials and the improvement in resolution by image processing. : Materials Science Forum. 巻. 675 677, Materials Science Forum, 巻. 675 677, pp. 259-262, 7th International Forum on Advanced Material Science and Technology, IFAMST-7, Dalian, 10/6/26. https://doi.org/10.4028/www.scientific.net/MSF.675-677.259
Zhang X, Takeguchi M, Hashimoto A, Mitsuishi K, Shimojo M. Application of scanning confocal electron microscopy to nanomaterials and the improvement in resolution by image processing. : Materials Science Forum. 巻 675 677. 2011. p. 259-262. (Materials Science Forum). https://doi.org/10.4028/www.scientific.net/MSF.675-677.259
Zhang, X. ; Takeguchi, Masaki ; Hashimoto, Ayako ; Mitsuishi, Kazutaka ; Shimojo, Masayuki. / Application of scanning confocal electron microscopy to nanomaterials and the improvement in resolution by image processing. Materials Science Forum. 巻 675 677 2011. pp. 259-262 (Materials Science Forum).
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