Application of scanning confocal electron microscopy to nanomaterials and the improvement in resolution by image processing

X. Zhang, Masaki Takeguchi, Ayako Hashimoto, Kazutaka Mitsuishi, Masayuki Shimojo

研究成果: Conference contribution

抄録

Scanning confocal electron microscopy (SCEM) is a novel technique for three-dimensional observation with a nanometer-scale resolution. Annular dark field (ADF) SCEM imaging has been demonstrated to have better depth resolution than bright field (BF) SCEM imaging. However, the depth resolution of ADF-SCEM images is limited by the vertical probe size determined by spherical aberration and convergence angle. Therefore, we attempted to employ a deconvolution image processing method to improve the depth resolution of SCEM images. The result of the deconvolution process for vertically sliced SCEM images showed the improvement in the depth resolution by 35-40%.

本文言語English
ホスト出版物のタイトルAdvanced Material Science and Technology
出版社Trans Tech Publications Ltd
ページ259-262
ページ数4
ISBN(印刷版)9783037850497
DOI
出版ステータスPublished - 2011
外部発表はい

出版物シリーズ

名前Materials Science Forum
675 677
ISSN(印刷版)0255-5476
ISSN(電子版)1662-9752

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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