Application of scanning confocal electron microscopy to nanomaterials and the improvement in resolution by image processing

X. Zhang, Masaki Takeguchi, Ayako Hashimoto, Kazutaka Mitsuishi, Masayuki Shimojo

研究成果: Conference contribution

抜粋

Scanning confocal electron microscopy (SCEM) is a novel technique for three-dimensional observation with a nanometer-scale resolution. Annular dark field (ADF) SCEM imaging has been demonstrated to have better depth resolution than bright field (BF) SCEM imaging. However, the depth resolution of ADF-SCEM images is limited by the vertical probe size determined by spherical aberration and convergence angle. Therefore, we attempted to employ a deconvolution image processing method to improve the depth resolution of SCEM images. The result of the deconvolution process for vertically sliced SCEM images showed the improvement in the depth resolution by 35-40%.

元の言語English
ホスト出版物のタイトルAdvanced Material Science and Technology
ページ259-262
ページ数4
DOI
出版物ステータスPublished - 2011 3 17
外部発表Yes
イベント7th International Forum on Advanced Material Science and Technology, IFAMST-7 - Dalian, China
継続期間: 2010 6 262010 6 28

出版物シリーズ

名前Materials Science Forum
675 677
ISSN(印刷物)0255-5476

Conference

Conference7th International Forum on Advanced Material Science and Technology, IFAMST-7
China
Dalian
期間10/6/2610/6/28

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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  • これを引用

    Zhang, X., Takeguchi, M., Hashimoto, A., Mitsuishi, K., & Shimojo, M. (2011). Application of scanning confocal electron microscopy to nanomaterials and the improvement in resolution by image processing. : Advanced Material Science and Technology (pp. 259-262). (Materials Science Forum; 巻数 675 677). https://doi.org/10.4028/www.scientific.net/MSF.675-677.259