Applications of a microlens array and a photomask to the laser microfabrication of a periodic photopolymer rod array

Shigeki Matsuo, Takashi Miyamoto, Takuro Tomita, Shuichi Hashimoto

研究成果: Article

15 引用 (Scopus)

抜粋

We report the simultaneous multipoint fabrication of polymer rods by the femtosecond laser processing of a negative photoresist using a microlens array (MLA). The rods were periodically arranged in the form of an array corresponding to the MLA and free-standing on a glass substrate. The use of a photomask enabled us to define the contour of the rod array. Furthermore, sample translation techniques were demonstrated for the effective fabrication of large-area structures.

元の言語English
ページ(範囲)8264-8267
ページ数4
ジャーナルApplied Optics
46
発行部数34
DOI
出版物ステータスPublished - 2007 12 1
外部発表Yes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

フィンガープリント Applications of a microlens array and a photomask to the laser microfabrication of a periodic photopolymer rod array' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

  • これを引用