TY - JOUR
T1 - Applications of microstructures fabricated by proton beam writing to electric-micro filters
AU - Furuta, Yusuke
AU - Nishikawa, Hiroyuki
AU - Satoh, Takahiro
AU - Ishii, Yasuyuki
AU - Kamiya, Tomihiro
AU - Nakao, Ryota
AU - Uchida, Satoshi
N1 - Funding Information:
This work was performed under the JAEA-Cooperation Research Program at TIARA and by “Academic Frontier” Project of the Ministry of Education, Culture, Sports, Science and Technology, Japan.
PY - 2009/6/15
Y1 - 2009/6/15
N2 - Fabrication of high-aspect-ratio microstructures was performed by proton beam writing (PBW) using a microbeam line at Takasaki Ion Accelerators for Advanced Radiation Application (TIARA), JAEA Takasaki, JAPAN. As one of the applications of the high-aspect-ratio structures micro-machined by PBW, we utilized the high-aspect pillars for electric-micro filters of microbes such as Escherichia coli and Yeast based on the dielectrophoretic force. The filter is equipped with high-aspect pillars with a height of ∼20 μm and a diameter of ∼1 μm on a glass plate. Evaluation of the dielectrophoresis (DEP) device for capturing E. coli and Yeast was made using either observation by optical microscope or photoluminescence (PL) measurements.
AB - Fabrication of high-aspect-ratio microstructures was performed by proton beam writing (PBW) using a microbeam line at Takasaki Ion Accelerators for Advanced Radiation Application (TIARA), JAEA Takasaki, JAPAN. As one of the applications of the high-aspect-ratio structures micro-machined by PBW, we utilized the high-aspect pillars for electric-micro filters of microbes such as Escherichia coli and Yeast based on the dielectrophoretic force. The filter is equipped with high-aspect pillars with a height of ∼20 μm and a diameter of ∼1 μm on a glass plate. Evaluation of the dielectrophoresis (DEP) device for capturing E. coli and Yeast was made using either observation by optical microscope or photoluminescence (PL) measurements.
KW - Electric-micro filter
KW - High-aspect-ratio microstructure
KW - Proton beam writing
KW - SU-8
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U2 - 10.1016/j.nimb.2009.03.037
DO - 10.1016/j.nimb.2009.03.037
M3 - Article
AN - SCOPUS:66349112545
SN - 0168-583X
VL - 267
SP - 2285
EP - 2288
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
IS - 12-13
ER -