Fabrication of high-aspect-ratio microstructures was performed by proton beam writing (PBW) using a microbeam line at Takasaki Ion Accelerators for Advanced Radiation Application (TIARA), JAEA Takasaki, JAPAN. As one of the applications of the high-aspect-ratio structures micro-machined by PBW, we utilized the high-aspect pillars for electric-micro filters of microbes such as Escherichia coli and Yeast based on the dielectrophoretic force. The filter is equipped with high-aspect pillars with a height of ∼20 μm and a diameter of ∼1 μm on a glass plate. Evaluation of the dielectrophoresis (DEP) device for capturing E. coli and Yeast was made using either observation by optical microscope or photoluminescence (PL) measurements.
|ジャーナル||Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms|
|出版ステータス||Published - 2009 6 15|
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