Arrayed micro ion source with ionic liquid for flexible and concurrent MEMS fabrication

Tatsuya Suzuki, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano

研究成果: Article査読

5 被引用数 (Scopus)

抄録

This paper reports a micro ion source array (MISA) for flexible and concurrent fabrication of multiple micro devices. In this study, the ionic liquid (IL) 1-ethyl-3-methylimidazolium tetrafluoroborate ([EMIM]-[BF 4]) was used as the ion source material to simplify the focused ion beam (FIB) system and integrate the ion sources with high density. A reservoir for the IL was integrated into the MISA by silicon micromachining. Experimental results confirmed the emission of the ions from the [EMIM]-[BF4] and the physical etching of the metal films by the ion emission. Also, silicon fluoride volatilization could be observed by mass spectroscopy when the silicon wafer was exposed to the emitted ion beam.

本文言語English
ページ(範囲)161-166
ページ数6
ジャーナルSensors and Actuators, A: Physical
215
DOI
出版ステータスPublished - 2014 8 15
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学

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