Automatic reflectivity map measurement of high power CO2 laser optics

H. Takahashi, M. Kimura, R. Sano

研究成果査読

3 被引用数 (Scopus)

抄録

An automatic system has been developed for the measurement of the reflectivity map of large-sized optics used in high-power CO2 laser devices. The CO2 laser beam is devided into two. One beam is reflected by the sample optic and the other is used as a reference. Both beams are chopped at separate frequencies and their polarizations are perpendicular. The relative reflectivity is obtained through the analysis of the two beam signals from the simultaneous detection. The normal of any measuring point is adjusted automatically by four-axes control, to coincide with the axis of the optical system. The reflectivity map of an optic with a diameter of up to 150 mm has been obtained. The accuracy of the reflectivity is confirmed to be within 0.5% of the measured value.

本文言語English
ページ(範囲)37-40
ページ数4
ジャーナルOptics and Laser Technology
21
1
DOI
出版ステータスPublished - 1989 2
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 原子分子物理学および光学
  • 電子工学および電気工学

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