Bloch wave-based calculation of imaging properties of high-resolution scanning confocal electron microscopy

K. Mitsuishi, K. Iakoubovskii, M. Takeguchi, M. Shimojo, A. Hashimoto, K. Furuya

研究成果: Article査読

18 被引用数 (Scopus)

抄録

An efficient, Bloch wave-based method is presented for simulation of high-resolution scanning confocal electron microscopy (SCEM) images. The latter are predicted to have coherent nature, i.e. to exhibit atomic contrast reversals depending on the lens defocus settings and sample thickness. The optimal defocus settings are suggested and the 3D imaging capabilities of SCEM are analyzed in detail. In particular, by monitoring average image intensity as a function of the probe focus depth, it should be possible to accurately measure the depth of a heavy-atom layer embedded in a light-element matrix.

本文言語English
ページ(範囲)981-988
ページ数8
ジャーナルUltramicroscopy
108
9
DOI
出版ステータスPublished - 2008 8 1
外部発表はい

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation

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