Bright-field scanning confocal electron microscopy using a double aberration-corrected transmission electron microscope

Peng Wang, Gavin Behan, Angus I. Kirkland, Peter D. Nellist, Eireann C. Cosgriff, Adrian J. D'Alfonso, Andrew J. Morgan, Leslie J. Allen, Ayako Hashimoto, Masaki Takeguchi, Kazutaka Mitsuishi, Masayuki Shimojo

研究成果: Article

14 引用 (Scopus)

抜粋

Scanning confocal electron microscopy (SCEM) offers a mechanism for three-dimensional imaging of materials, which makes use of the reduced depth of field in an aberration-corrected transmission electron microscope. The simplest configuration of SCEM is the bright-field mode. In this paper we present experimental data and simulations showing the form of bright-field SCEM images. We show that the depth dependence of the three-dimensional image can be explained in terms of two-dimensional images formed in the detector plane. For a crystalline sample, this so-called probe image is shown to be similar to a conventional diffraction pattern. Experimental results and simulations show how the diffracted probes in this image are elongated in thicker crystals and the use of this elongation to estimate sample thickness is explored.

元の言語English
ページ(範囲)877-886
ページ数10
ジャーナルUltramicroscopy
111
発行部数7
DOI
出版物ステータスPublished - 2011 6 1
外部発表Yes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation

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    Wang, P., Behan, G., Kirkland, A. I., Nellist, P. D., Cosgriff, E. C., D'Alfonso, A. J., Morgan, A. J., Allen, L. J., Hashimoto, A., Takeguchi, M., Mitsuishi, K., & Shimojo, M. (2011). Bright-field scanning confocal electron microscopy using a double aberration-corrected transmission electron microscope. Ultramicroscopy, 111(7), 877-886. https://doi.org/10.1016/j.ultramic.2010.10.012