Challenges in the micromachining by proton beam writing and its applications

研究成果: Review article査読

抄録

Proton beam writing (PBW) is a direct writing technique for the fabrication of micro- and submicron-scale structures with high-aspect ratio. The straight trajectory of MeV protons incident to target materials allows high-aspect-ratio micromachining with high throughput, when compared with a conventional direct writing process using low-energy electron beam. The principles and superior features of the PBW technique are illustrated by demonstrating the micromachining by PBW on various resists. Application of the high-aspect-pillar structures by PBW is also demonstrated for electro-micro filters using dielectrophoresis.

本文言語English
ページ(範囲)461-466
ページ数6
ジャーナルIEEJ Transactions on Fundamentals and Materials
128
7
DOI
出版ステータスPublished - 2008

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

フィンガープリント 「Challenges in the micromachining by proton beam writing and its applications」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル