Change of electrical properties of rutile- and anatase-TiO2 films by atomic layer deposited Al2O3
Toshihide Nabatame, Ippei Yamamoto, Tomomi Sawada, Akihiko Ohi, Thang Duy Dao, Tomoji Ohishi, Tadaaki Nagao
研究成果: Conference contribution
2
被引用数
(Scopus)