Characterization of Epitaxial-PZT/SI Piezoelectric Micromachined Ultrasonic Transducer (PMUT) and its Phased Array System

Ziyi Liu, Shinya Yoshida, Toshiaki Horie, Shoji Okamoto, Ryouichi Takayama, Shuji Tanaka

研究成果: Conference contribution

12 被引用数 (Scopus)

抄録

In this study, we have demonstrated the usability of an epitaxial lead zirconate titanate (Epi-PZT) thin film for a piezoelectric micromachined ultrasonic transducer (pMUT) imager. At first, transmitting abilities and receiving sensitivities of the single-element pMUT based on Epi PZT and polycrystalline PZT (Poly-PZT) were evaluated as a fundamental study. Then, the 8-ch linear array system driven by a commercially-available pulser board was built, and successfully formed a focused ultrasonic beam. Finally, we obtained the ultrasonic images of a polydimethylsiloxane-based phantom by using the Epi-PZT and Poly-PZT pMUT linear array, and experimentally proved that Epi-PZT pMUT array can obtain higher contrast image compared to Poly-PZT device.

本文言語English
ホスト出版物のタイトル2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
出版社Institute of Electrical and Electronics Engineers Inc.
ページ246-249
ページ数4
ISBN(電子版)9781728120072
DOI
出版ステータスPublished - 2019 6月
外部発表はい
イベント20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany
継続期間: 2019 6月 232019 6月 27

出版物シリーズ

名前2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
国/地域Germany
CityBerlin
Period19/6/2319/6/27

ASJC Scopus subject areas

  • プロセス化学およびプロセス工学
  • 分光学
  • 電子工学および電気工学
  • 機械工学
  • 電子材料、光学材料、および磁性材料
  • 制御と最適化
  • 器械工学

フィンガープリント

「Characterization of Epitaxial-PZT/SI Piezoelectric Micromachined Ultrasonic Transducer (PMUT) and its Phased Array System」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル