Distributions of structural and refractive index changes of silica irradiated by H+ microbeam were studied by optical and atomic force microscopes (AFM). The AFM measurements on the microbeam irradiated area show the formation of a groove on the surface. In addition, a cross sectional observation on the surface parallel to the incident plane reveals surface deformation along the ion tracks, which is deepest at the projected range of ions. Taking into account the possible structural changes of silica induced by energy deposition calculated by TRIM, the measured topological changes at the front and side surfaces result from internal compaction of silica glass. Refractive index changes were estimated from the Lorentz-Lorenz relationship using the distribution of the internal compaction estimated by the AFM measurements.
|ジャーナル||Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms|
|出版ステータス||Published - 2003 9月|
|イベント||8th International Conference on Nuclear Microprobe Technology - Takasaki, Japan|
継続期間: 2002 9月 8 → 2002 9月 13
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