Chemical Modification of Titanium Nitride Films via Ion Implantation

Engineering & Materials Science

• Chemical modification 100%
• Titanium nitride 95%
• Ion implantation 91%
• Chlorine 82%
• Oxidation resistance 55%
• Aluminum 51%
• Carbon 50%
• Wear of materials 49%
• Oxidation 39%
• Point defects 34%
• Titanium oxides 32%
• Surface reactions 32%
• Friction 31%
• Ceramic coatings 29%
• High speed steel 27%
• Oxide films 27%
• Nanostructures 27%
• Surface structure 27%
• Tool steel 26%
• Solid solutions 25%
• Cutting tools 23%
• Aluminum oxide 21%
• Wear resistance 20%
• Ions 20%
• Oxygen 18%
• Substrates 15%
• Microstructure 15%
• Temperature 8%

Chemical Compounds

• Ion Implantation 82%
• Nitride 64%
• Wear 47%
• Modification 37%
• Liquid Film 32%
• Resistance 31%
• Oxidation Reaction 30%
• Chlorine 29%
• Cutting Tool 24%
• Ceramic Coating 22%
• Crystal Point Defect 21%
• Wear Rate 21%
• Titanium Oxide 18%
• Friction Coefficient 18%
• Nonequilibrium 17%
• Surface Reaction 17%
• Carbon Atom 15%
• Solid Solution 14%
• Protective 14%
• Microstructure 11%
• Molecular Cluster 10%
• Nanomaterial 10%
• Volume 9%
• Dioxygen 8%
• Surface 5%

Physics & Astronomy

• titanium nitrides 81%
• ion implantation 61%
• implantation 59%
• chlorine 42%
• oxidation resistance 31%
• aluminum 27%
• carbon 26%
• oxidation 19%
• ceramic coatings 16%
• wear resistance 14%
• titanium oxides 13%
• surface reactions 13%
• coefficient of friction 13%
• point defects 12%
• oxide films 12%
• friction 11%
• solid solutions 11%
• aluminum oxides 10%
• high speed 10%
• steels 9%
• oxygen 8%
• microstructure 7%
• ions 6%
• temperature 3%