TY - GEN
T1 - Chemical vapor deposition of nanocarbon on electroless Ni-B alloy catalyst
AU - Tanaka, Toru
AU - Sato, Tomomi
AU - Karasawa, Yusuke
AU - Ueno, Kazuyoshi
PY - 2010
Y1 - 2010
N2 - CNT and graphite have been deposited by CVD on electroless Ni-B catalysts. The deposit structures were found to depend on the Ni-B thickness. CNTs were grown on the 10nm-thick Ni-B, and graphite film was deposited on the 30nm- and thicker Ni-B. The CVD temperature could be lowered to 450 °C, but the graphite quality was degraded from that of 600°CCVD.
AB - CNT and graphite have been deposited by CVD on electroless Ni-B catalysts. The deposit structures were found to depend on the Ni-B thickness. CNTs were grown on the 10nm-thick Ni-B, and graphite film was deposited on the 30nm- and thicker Ni-B. The CVD temperature could be lowered to 450 °C, but the graphite quality was degraded from that of 600°CCVD.
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M3 - Conference contribution
AN - SCOPUS:79957657821
SN - 9781617822810
T3 - Advanced Metallization Conference (AMC)
SP - 258
EP - 259
BT - Advanced Metallization Conference 2010
T2 - Advanced Metallization Conference 2010
Y2 - 5 October 2010 through 7 October 2010
ER -