Chemical vapor deposition of nanocarbon on electroless Ni-B alloy catalyst

Toru Tanaka, Tomomi Sato, Yusuke Karasawa, Kazuyoshi Ueno

研究成果: Conference contribution

抜粋

CNT and graphite have been deposited by CVD on electroless Ni-B catalysts. The deposit structures were found to depend on the Ni-B thickness. CNTs were grown on the 10nm-thick Ni-B, and graphite film was deposited on the 30nm- and thicker Ni-B. The CVD temperature could be lowered to 450 °C, but the graphite quality was degraded from that of 600°CCVD.

元の言語English
ホスト出版物のタイトルAdvanced Metallization Conference 2010
ページ258-259
ページ数2
出版物ステータスPublished - 2010 12 1
イベントAdvanced Metallization Conference 2010 - Albany, NY, United States
継続期間: 2010 10 52010 10 7

出版物シリーズ

名前Advanced Metallization Conference (AMC)
ISSN(印刷物)1540-1766

Conference

ConferenceAdvanced Metallization Conference 2010
United States
Albany, NY
期間10/10/510/10/7

ASJC Scopus subject areas

  • Materials Science(all)
  • Industrial and Manufacturing Engineering

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  • これを引用

    Tanaka, T., Sato, T., Karasawa, Y., & Ueno, K. (2010). Chemical vapor deposition of nanocarbon on electroless Ni-B alloy catalyst. : Advanced Metallization Conference 2010 (pp. 258-259). (Advanced Metallization Conference (AMC)).