Chemical vapor deposition of nanocarbon on electroless Ni-B alloy catalyst

Toru Tanaka, Tomomi Sato, Yusuke Karasawa, Kazuyoshi Ueno

研究成果

抄録

CNT and graphite have been deposited by CVD on electroless Ni-B catalysts. The deposit structures were found to depend on the Ni-B thickness. CNTs were grown on the 10nm-thick Ni-B, and graphite film was deposited on the 30nm- and thicker Ni-B. The CVD temperature could be lowered to 450 °C, but the graphite quality was degraded from that of 600°CCVD.

本文言語English
ホスト出版物のタイトルAdvanced Metallization Conference 2010
ページ258-259
ページ数2
出版ステータスPublished - 2010
イベントAdvanced Metallization Conference 2010 - Albany, NY, United States
継続期間: 2010 10 52010 10 7

出版物シリーズ

名前Advanced Metallization Conference (AMC)
ISSN(印刷版)1540-1766

Conference

ConferenceAdvanced Metallization Conference 2010
国/地域United States
CityAlbany, NY
Period10/10/510/10/7

ASJC Scopus subject areas

  • 材料科学(全般)
  • 産業および生産工学

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