Coating with supersonic free-jet PVD

Naotake Niwa, Atsushi Yumoto, Takahisa Yamamoto, Fujio Hiroki, Ichiro Shiota

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

Recently, requirements for structural materials become increasingly severe. A coating is one of the most promising methods to achieve the requirements. However, conventional coating processes generally have technical problems. We apply Supersonic Free-Jet PVD (SFJ-PVD) to coating. The SFJ-PVD is a technique to deposit nanoparticles with supersonic gas flow and to form a thick coating film without a crack or a void. This method is composed of "gas evaporation" and "vacuum deposition". In a gas evaporation chamber, a source material is evaporated to form nanoparticles in an inert gas atmosphere. The nanoparticles are then carried to a substrate in a deposition chamber with an inert gas flow through a transfer pipe. The gas flow is generated by the pressure difference between the chambers and accelerated through a supersonic nozzle. With SFJ-PVD, We obtain uniform several hundreds micron meter-thick, high-density coatings.

本文言語English
ホスト出版物のタイトルSelected, peer reviewed papers from The Sixth Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6
出版社Trans Tech Publications Ltd
ページ981-984
ページ数4
PART 2
ISBN(印刷版)0878494626, 9780878494620
DOI
出版ステータスPublished - 2007
外部発表はい
イベント6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6 - Jeju, Korea, Republic of
継続期間: 2007 11 52007 11 9

出版物シリーズ

名前Materials Science Forum
番号PART 2
561-565
ISSN(印刷版)0255-5476
ISSN(電子版)1662-9752

Conference

Conference6th Pacific Rim International Conference on Advanced Materials and Processing, PRICM 6
国/地域Korea, Republic of
CityJeju
Period07/11/507/11/9

ASJC Scopus subject areas

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学

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