Coatings and microstructures of monolithic TiB₂ films and double layer and composite TiCN/TiB₂ films from alkoxide solutions by thermal plasma CVD

Engineering & Materials Science

• Plasma CVD 100%
• Coatings 41%
• Microstructure 37%
• Composite materials 31%
• Hot Temperature 26%
• Plasmas 12%
• Composite films 9%
• Chemical analysis 8%
• X ray photoelectron spectroscopy 8%
• Molar ratio 8%
• Chemical vapor deposition 8%
• Boron 7%
• Transmission electron microscopy 7%
• Titanium 6%
• Scanning electron microscopy 5%
• Flow rate 5%

Physics & Astronomy

• alkoxides 74%
• thermal plasmas 66%
• vapor deposition 42%
• coatings 37%
• composite materials 33%
• microstructure 32%
• boron 5%
• titanium 5%
• flow velocity 4%
• wafers 4%
• transmission electron microscopy 4%
• scanning electron microscopy 3%
• cross sections 3%

Chemical Compounds

• Thermal Plasma 78%
• Plasma Chemical Vapour Deposition 74%
• Microstructure 37%
• Coating Agent 32%
• Composite Material 27%
• Liquid Film 26%
• Plasma 7%
• Chemical Vapour Deposition 5%
• Boron Atom 5%
• Flow Kinetics 4%
• Mixture 2%
• Surface 1%