Commercial Production of Low-k PZT film using Sputtering Method

Mario Kiuchi, Ryoma Miyake, Shinya Yoshida, Shuji Tanaka, Tsuyoshi Takemoto, Yukitaka Yamaguchi, Kenji Komaki

研究成果: Conference contribution

抄録

Monocrystalline-like epitaxial PZT films for commercial use are described for piezoelectric MEMS applications. The composition ratios of Zr and Ti in the films are Morphotropic phase boundary (52:48) and Ti rich (42:58). The films with a thickness of 1 μm to 2 μm exhibit typical transverse piezoelectric d31 coefficients of-185 pm/V and-149 pm/V, respectively. Relative dielectric permittivities are 430 and 264. Dielectric losses are 0.015 and 0.020. Both of films of figure-of-merit for MEMS device are more than 50 GPa. These films are commercially available for piezoelectric MEMS device development and production.

本文言語English
ホスト出版物のタイトルIEEE Sensors, SENSORS 2020 - Conference Proceedings
出版社Institute of Electrical and Electronics Engineers Inc.
ISBN(電子版)9781728168012
DOI
出版ステータスPublished - 2020 10月 25
外部発表はい
イベント2020 IEEE Sensors, SENSORS 2020 - Virtual, Rotterdam, Netherlands
継続期間: 2020 10月 252020 10月 28

出版物シリーズ

名前Proceedings of IEEE Sensors
2020-October
ISSN(印刷版)1930-0395
ISSN(電子版)2168-9229

Conference

Conference2020 IEEE Sensors, SENSORS 2020
国/地域Netherlands
CityVirtual, Rotterdam
Period20/10/2520/10/28

ASJC Scopus subject areas

  • 電子工学および電気工学

フィンガープリント

「Commercial Production of Low-k PZT film using Sputtering Method」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル