Contact angle measurement of GaInAsP surfaces for wafer direct bonding with garnet crystals

H. Yokoi, T. Mizumoto, M. Shimizu, T. Waniishi, N. Futakuchi, N. Kaida, Y. Nakano

研究成果: Conference contribution

抄録

GaInAsP surfaces were investigated by contact angle measurement of a water droplet to estimate their hydrophilicity. The most hydrophilic surface of GaInAsP was obtained by the O2 plasma activation process. Wafer direct bonding was successfully achieved between O2 plasma activated GaInAsP and garnet crystals.

本文言語English
ホスト出版物のタイトルCLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics
出版社Institute of Electrical and Electronics Engineers Inc.
ページ1206-1207
ページ数2
ISBN(電子版)0780356616, 9780780356610
DOI
出版ステータスPublished - 1999 1 1
外部発表はい
イベント1999 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 1999 - Seoul, Korea, Republic of
継続期間: 1999 8 301999 9 3

出版物シリーズ

名前CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics
4

Conference

Conference1999 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 1999
CountryKorea, Republic of
CitySeoul
Period99/8/3099/9/3

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Computer Networks and Communications
  • Physics and Astronomy(all)

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