Cross-sectional TEM analysis of structural change in 4H-SiC single crystal irradiated by femtosecond laser pulses

Hiroyuki Kawahara, Tatsuya Okada, Ryota Kumai, Takuro Tomita, Shigeki Matsuo, Shuichi Hashimoto, Makoto Yamaguchi

研究成果: Conference contribution

フィンガープリント 「Cross-sectional TEM analysis of structural change in 4H-SiC single crystal irradiated by femtosecond laser pulses」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy