Current sensors using Fe-B-Nd-Nb magnetic metallic glass micro-cantilevers

Tuan Anh Phan, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano

研究成果: Article

12 引用 (Scopus)

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We report on the development of MEMS current sensors composed of Fe67.5B22.5Nd6.3Nb3.7 (FBNN) magnetic metallic glass thin films. These current sensors are based on free-standing cantilever structures that benefit from the superior mechanical properties of the metallic glass, such as high fracture toughness and high yield strength. The resonant frequency of the proposed FBNN cantilever was 3.85 kHz in the fundamental flexure mode when the length, width and thickness of the cantilever were 750 μm, 150 μm and 3 μm, respectively. A feed wire with a diameter of 500 μm was placed close to the FBNN cantilever, and a downshift in the resonance peak was observed when the current intensity through the feed wire increased. The sensitivity of this frequency shift to the current intensity was 5.0 √Hz/A when the distance between the cantilever and the wire was 500 μm.

元の言語English
ページ(範囲)28-31
ページ数4
ジャーナルMicroelectronic Engineering
135
DOI
出版物ステータスPublished - 2015 3 5
外部発表Yes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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