Deep-ultraviolet micro-Raman investigation of surface defects in a 4H-SiC homoepitaxially grown film

Takuro Tomita, Shigeki Matsuo, Tatsuya Okada, Tsunenobu Kimoto, Hiroyuki Matsunami, Takeshi Mitani, Shin Ichi Nakashima

研究成果: Article査読

10 被引用数 (Scopus)

抄録

The structures of comet defects in a 4H-SiC homoepitaxially grown film are investigated by deep-ultraviolet micro-Raman spectroscopy. Spatial distribution of the 4H- and 3C-SiC is clearly distinguished both from the intensities of the folded longitudinal acoustic phonon mode and the peak energies of the nonfolded longitudinal optical phonon mode. The mappings of these parameters indicate the existence of two types of comets. The mechanisms of heteropolytypic inclusion in comets are discussed.

本文言語English
論文番号241906
ページ(範囲)1-3
ページ数3
ジャーナルApplied Physics Letters
87
24
DOI
出版ステータスPublished - 2005
外部発表はい

ASJC Scopus subject areas

  • 物理学および天文学(その他)

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