Deep-ultraviolet micro-Raman investigation of surface defects in a 4H-SiC homoepitaxially grown film

Takuro Tomita, Shigeki Matsuo, Tatsuya Okada, Tsunenobu Kimoto, Hiroyuki Matsunami, Takeshi Mitani, Shin Ichi Nakashima

研究成果: Article

10 引用 (Scopus)

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The structures of comet defects in a 4H-SiC homoepitaxially grown film are investigated by deep-ultraviolet micro-Raman spectroscopy. Spatial distribution of the 4H- and 3C-SiC is clearly distinguished both from the intensities of the folded longitudinal acoustic phonon mode and the peak energies of the nonfolded longitudinal optical phonon mode. The mappings of these parameters indicate the existence of two types of comets. The mechanisms of heteropolytypic inclusion in comets are discussed.

元の言語English
記事番号241906
ページ(範囲)1-3
ページ数3
ジャーナルApplied Physics Letters
87
発行部数24
DOI
出版物ステータスPublished - 2005 12 20

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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  • これを引用

    Tomita, T., Matsuo, S., Okada, T., Kimoto, T., Matsunami, H., Mitani, T., & Nakashima, S. I. (2005). Deep-ultraviolet micro-Raman investigation of surface defects in a 4H-SiC homoepitaxially grown film. Applied Physics Letters, 87(24), 1-3. [241906]. https://doi.org/10.1063/1.2142080