In this study, deformation behavior of fine-grained austenitic stainless steel micro-cantilever beams was investigated using a newly developed testing machine for micro-sized specimens. The microbeams were deformed to different strain hardening stages of the material, and then the detailed deformation behavior on the specimen surface at the corresponding strain hardening stage was examined by scanning electron microscopy. Two deformation mechanisms corresponding to different strain hardening stages were found in the micro-sized austenitic stainless steel with fine grains. The dislocation slip mechanism characterized by the extensive dislocation slips and their interaction with grain boundaries resulted in the stage I strain hardening. With increasing deformation, the grain boundary sliding (GBS) mechanism at the stage II and subsequently intergranular cracking occurred. The differences in stress condition and work-hardening behavior on the top tension-side and rear compression-side surfaces of the micro-cantilever beam resulted in the different deformation behavior.
|ジャーナル||Materials Research Society Symposium - Proceedings|
|出版ステータス||Published - 2001|
|イベント||Material Science of Microelectromechanical Systems (MEMS) Devices III - Boston, MA, United States|
継続期間: 2000 11 27 → 2000 11 28
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