Deposition and wear resistance of composite TiBC-SiC coatings on Si wafer by thermal plasma CVD

Physics & Astronomy

• thermal plasmas 66%
• wear resistance 59%
• vapor deposition 42%
• wafers 41%
• coatings 37%
• composite materials 33%
• balls 24%
• wear tests 18%
• cross sections 16%
• grazing incidence 14%
• boron 11%
• titanium 11%
• aluminum oxides 11%
• hardness 10%
• transmission electron microscopy 9%
• scanning electron microscopy 8%
• microstructure 8%
• profiles 7%
• diffraction 7%
• thin films 7%
• x rays 6%

Engineering & Materials Science

• Plasma CVD 100%
• Wear resistance 51%
• Coatings 41%
• Composite materials 31%
• Wear of materials 30%
• Hot Temperature 26%
• Boron 15%
• Crystalline materials 14%
• Energy dispersive spectroscopy 14%
• Transmission electron microscopy 14%
• Alumina 13%
• X ray diffraction 13%
• Titanium 13%
• Thin films 13%
• Scanning electron microscopy 10%
• Hardness 10%
• Microstructure 9%

Chemical Compounds

• Thermal Plasma 78%
• Plasma Chemical Vapour Deposition 74%
• Wear 51%
• Resistance 34%
• Coating Agent 32%
• Composite Material 27%
• Liquid Film 26%
• Wear Rate 17%
• Boron Atom 11%
• Microstructure 9%
• Transmission Electron Microscopy 9%
• Scanning Electron Microscopy 8%
• X-Ray Diffraction 6%