フィンガープリント
「Deposition and wear resistance of composite TiBC-SiC coatings on Si wafer by thermal plasma CVD」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。
Chemical Compounds
Plasma CVD
Plasma Gases
Wear resistance
Coatings
Composite materials
disiloxane
Wear of materials
Boron
Crystalline materials
Titanium
Energy dispersive spectroscopy
Transmission electron microscopy
X ray diffraction
Thin films
Scanning electron microscopy
Hardness
Microstructure
Physics & Astronomy
thermal plasmas
wear resistance
vapor deposition
wafers
coatings
composite materials
balls
wear tests
cross sections
grazing incidence
boron
titanium
aluminum oxides
hardness
transmission electron microscopy
scanning electron microscopy
microstructure
profiles
diffraction
thin films
x rays
Engineering & Materials Science
Plasma CVD
Wear resistance
Coatings
Composite materials
Wear of materials
Hot Temperature
Crystalline materials
Energy dispersive spectroscopy
Transmission electron microscopy
X ray diffraction
Alumina
Titanium
Thin films
Scanning electron microscopy
Microstructure