Design of Implementable Adaptive Control for Micro/Nano Positioning System Driven by Piezoelectric Actuator

Xinkai Chen, Chun Yi Su, Zhi Li, Fan Yang

研究成果: Article査読

74 被引用数 (Scopus)

抄録

The micro/nano positioning system discussed in this paper includes a piezoelectric actuator (PEA) and flexure-hinge-based positioning mechanism. Due to the existence of the hysteretic nonlinearity in the PEA and the friction in the system, the accurate positioning of the piezo-actuated positioning system calls applicable control schemes for practical applications. To this end, an implementable adaptive controller is developed in the paper, where a minimized parameterization hysteresis model is employed to reduce the computational load. The formulated adaptive control law guarantees the global stability of the controlled positioning system, and the positioning error can approach to zero asymptotically. The advantages of the proposed method making on-line implementation feasible are that the traditional inversion of the hysteresis does not need to be constructed directly; the real values of the parameters of the positioning system neither need to be identified nor measured; only the parameters in the formulation of the controller are estimated online. Comparison with the feedforward plus proportional-integral feedback control scheme is conducted and experimental results show the effectiveness of the proposed method.

本文言語English
論文番号7479557
ページ(範囲)6471-6481
ページ数11
ジャーナルIEEE Transactions on Industrial Electronics
63
10
DOI
出版ステータスPublished - 2016 10

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 電子工学および電気工学

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