Detection of deposition rate of plasma-polymerized films by quartz crystal microbalance

Shigeru Kurosawa, Tomoya Hirokawa, Kazuya Kashima, Hidenobu Aizawa, Dae Sang Han, Yasuo Yoshimi, Yuji Okada, Kiyoshi Yase, Jun Miyake, Minoru Yoshimoto, Jöns Hilborn