TY - JOUR
T1 - Development of a stage-scanning system for high-resolution confocal STEM
AU - Takeguchi, Masaki
AU - Hashimoto, Ayako
AU - Shimojo, Masayuki
AU - Mitsuishi, Kazutaka
AU - Furuya, Kazuo
PY - 2008/8/1
Y1 - 2008/8/1
N2 - A stage-scanning system is composed of a specially designed transmission electron microscopy specimen holder equipped with a piezo-driven specimen stage, power supplier and control software. This system enables the specimen to be scanned three-dimensionally, and therefore confocal scanning transmission electron microscopy (STEM) can be performed with a fixed electron-optics configuration. It is demonstrated that stage-scanning confocal STEM images can be obtained with the lateral atomic resolution and the specimen can be moved three-dimensionally with high precision.
AB - A stage-scanning system is composed of a specially designed transmission electron microscopy specimen holder equipped with a piezo-driven specimen stage, power supplier and control software. This system enables the specimen to be scanned three-dimensionally, and therefore confocal scanning transmission electron microscopy (STEM) can be performed with a fixed electron-optics configuration. It is demonstrated that stage-scanning confocal STEM images can be obtained with the lateral atomic resolution and the specimen can be moved three-dimensionally with high precision.
KW - Confocal scanning transmission electron microscopy
KW - Optical sectioning
KW - Piezo actuators
KW - Pinhole
KW - Stage-scanning system
KW - Three-dimensional scanning
UR - http://www.scopus.com/inward/record.url?scp=47649083560&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=47649083560&partnerID=8YFLogxK
U2 - 10.1093/jmicro/dfn010
DO - 10.1093/jmicro/dfn010
M3 - Article
C2 - 18603569
AN - SCOPUS:47649083560
VL - 57
SP - 123
EP - 127
JO - Microscopy (Oxford, England)
JF - Microscopy (Oxford, England)
SN - 2050-5698
IS - 4
ER -