Development of a stage-scanning system for high-resolution confocal STEM

Masaki Takeguchi, Ayako Hashimoto, Masayuki Shimojo, Kazutaka Mitsuishi, Kazuo Furuya

研究成果: Article査読

46 被引用数 (Scopus)

抄録

A stage-scanning system is composed of a specially designed transmission electron microscopy specimen holder equipped with a piezo-driven specimen stage, power supplier and control software. This system enables the specimen to be scanned three-dimensionally, and therefore confocal scanning transmission electron microscopy (STEM) can be performed with a fixed electron-optics configuration. It is demonstrated that stage-scanning confocal STEM images can be obtained with the lateral atomic resolution and the specimen can be moved three-dimensionally with high precision.

本文言語English
ページ(範囲)123-127
ページ数5
ジャーナルJournal of Electron Microscopy
57
4
DOI
出版ステータスPublished - 2008 8 1
外部発表はい

ASJC Scopus subject areas

  • Instrumentation

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