Development of Dielectrophoretic Devices with High-Aspect Ratio Microstructures Using Proton Beam Writing

Yasuharu Shiine; Hiroyuki Nishikawa; Yusuke Furuta; T. Sato; Yasuyuki Ishii; Tomihiro Kamiya; Ryota Nakao; Satoshi Uchida

Development of Dielectrophoretic Devices with High-Aspect Ratio Microstructures Using Proton Beam Writing

Yasuharu Shiine, Hiroyuki Nishikawa, Yusuke Furuta, T. Sato, Yasuyuki Ishii, Tomihiro Kamiya, Ryota Nakao, Satoshi Uchida

研究成果: Article › 査読

本文言語	English
ジャーナル	Proceedings of the 16th International Conference on Surface Modification of Materials by Ion Beams (September 13-18, 2009)
出版ステータス	Published - 2009 9月 1

引用スタイル

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title = "Development of Dielectrophoretic Devices with High-Aspect Ratio Microstructures Using Proton Beam Writing",

author = "Yasuharu Shiine and Hiroyuki Nishikawa and Yusuke Furuta and T. Sato and Yasuyuki Ishii and Tomihiro Kamiya and Ryota Nakao and Satoshi Uchida",

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T1 - Development of Dielectrophoretic Devices with High-Aspect Ratio Microstructures Using Proton Beam Writing

AU - Shiine, Yasuharu

AU - Nishikawa, Hiroyuki

AU - Furuta, Yusuke

AU - Sato, T.

AU - Ishii, Yasuyuki

AU - Kamiya, Tomihiro

AU - Nakao, Ryota

AU - Uchida, Satoshi

PY - 2009/9/1

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M3 - Article

JO - Proceedings of the 16th International Conference on Surface Modification of Materials by Ion Beams (September 13-18, 2009)

JF - Proceedings of the 16th International Conference on Surface Modification of Materials by Ion Beams (September 13-18, 2009)

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