Development of high-resolution MFM-tips

Michael R. Koblischka, Astrid N. Müller, Uwe Hartmann, Thomas Sulzbach, Paul M. Dodd

研究成果: Conference article査読

抄録

The preparation of high-resolution magnetic force microscopy (MFM) tips using the EBD method for MFM measurements on soft magnetic materials was discussed. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of the magnetic material at the very end of the tip to achieve maximum lateral resolution. The results using these tips for measurements on GMR read heads were presented.

本文言語English
ページ(範囲)DU03
ジャーナルDigests of the Intermag Conference
出版ステータスPublished - 2002 12 1
外部発表はい
イベント2002 IEEE International Magnetics Conference-2002 IEEE INTERMAG - Amsterdam, Netherlands
継続期間: 2002 4 282002 5 2

ASJC Scopus subject areas

  • 電子工学および電気工学

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