Development of high-resolution MFM-tips

Michael R. Koblischka; Astrid N. Müller; Uwe Hartmann; Thomas Sulzbach; Paul M. Dodd

Development of high-resolution MFM-tips

Michael R. Koblischka, Astrid N. Müller, Uwe Hartmann, Thomas Sulzbach, Paul M. Dodd

研究成果: Conference article › 査読

抄録

The preparation of high-resolution magnetic force microscopy (MFM) tips using the EBD method for MFM measurements on soft magnetic materials was discussed. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of the magnetic material at the very end of the tip to achieve maximum lateral resolution. The results using these tips for measurements on GMR read heads were presented.

本文言語	English
ページ（範囲）	DU03
ジャーナル	Digests of the Intermag Conference
出版ステータス	Published - 2002 12月 1
外部発表	はい
イベント	2002 IEEE International Magnetics Conference-2002 IEEE INTERMAG - Amsterdam, Netherlands 継続期間: 2002 4月 28 → 2002 5月 2

ASJC Scopus subject areas

電子工学および電気工学

他のファイルとリンク

引用スタイル

@article{c9f00603c7f5425f91f862d9f0742186,

title = "Development of high-resolution MFM-tips",

abstract = "The preparation of high-resolution magnetic force microscopy (MFM) tips using the EBD method for MFM measurements on soft magnetic materials was discussed. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of the magnetic material at the very end of the tip to achieve maximum lateral resolution. The results using these tips for measurements on GMR read heads were presented.",

author = "Koblischka, {Michael R.} and M{\"u}ller, {Astrid N.} and Uwe Hartmann and Thomas Sulzbach and Dodd, {Paul M.}",

year = "2002",

month = dec,

day = "1",

language = "English",

pages = "DU03",

journal = "Digests of the Intermag Conference",

issn = "0074-6843",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "2002 IEEE International Magnetics Conference-2002 IEEE INTERMAG ; Conference date: 28-04-2002 Through 02-05-2002",

}

TY - JOUR

T1 - Development of high-resolution MFM-tips

AU - Koblischka, Michael R.

AU - Müller, Astrid N.

AU - Hartmann, Uwe

AU - Sulzbach, Thomas

AU - Dodd, Paul M.

PY - 2002/12/1

Y1 - 2002/12/1

N2 - The preparation of high-resolution magnetic force microscopy (MFM) tips using the EBD method for MFM measurements on soft magnetic materials was discussed. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of the magnetic material at the very end of the tip to achieve maximum lateral resolution. The results using these tips for measurements on GMR read heads were presented.

AB - The preparation of high-resolution magnetic force microscopy (MFM) tips using the EBD method for MFM measurements on soft magnetic materials was discussed. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of the magnetic material at the very end of the tip to achieve maximum lateral resolution. The results using these tips for measurements on GMR read heads were presented.

UR - http://www.scopus.com/inward/record.url?scp=0036917077&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0036917077&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0036917077

SP - DU03

JO - Digests of the Intermag Conference

JF - Digests of the Intermag Conference

SN - 0074-6843

T2 - 2002 IEEE International Magnetics Conference-2002 IEEE INTERMAG

Y2 - 28 April 2002 through 2 May 2002

ER -

Development of high-resolution MFM-tips

抄録

ASJC Scopus subject areas

他のファイルとリンク

フィンガープリント

引用スタイル