The preparation of high-resolution magnetic force microscopy (MFM) tips using the EBD method for MFM measurements on soft magnetic materials was discussed. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of the magnetic material at the very end of the tip to achieve maximum lateral resolution. The results using these tips for measurements on GMR read heads were presented.
|ジャーナル||Digests of the Intermag Conference|
|出版ステータス||Published - 2002 12月 1|
|イベント||2002 IEEE International Magnetics Conference-2002 IEEE INTERMAG - Amsterdam, Netherlands|
継続期間: 2002 4月 28 → 2002 5月 2
ASJC Scopus subject areas