抄録
In this contribution, we report on the preparation of high-resolution MFM tips using the EBD-method for MFM measurements on soft magnetic samples. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of magnetic material at the very end of a commercial scanning microscope tip to achieve maximum lateral resolution with low magnetic moment.
本文言語 | English |
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ホスト出版物のタイトル | INTERMAG Europe 2002 - IEEE International Magnetics Conference |
編集者 | J. Fidler, B. Hillebrands, C. Ross, D. Weller, L. Folks, E. Hill, M. Vazquez Villalabeitia, J. A. Bain, Jo De Boeck, R. Wood |
出版社 | Institute of Electrical and Electronics Engineers Inc. |
ISBN(電子版) | 0780373650, 9780780373655 |
DOI | |
出版ステータス | Published - 2002 1月 1 |
外部発表 | はい |
イベント | 2002 IEEE International Magnetics Conference, INTERMAG Europe 2002 - Amsterdam, Netherlands 継続期間: 2002 4月 28 → 2002 5月 2 |
Other
Other | 2002 IEEE International Magnetics Conference, INTERMAG Europe 2002 |
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国/地域 | Netherlands |
City | Amsterdam |
Period | 02/4/28 → 02/5/2 |
ASJC Scopus subject areas
- 電子材料、光学材料、および磁性材料
- 電子工学および電気工学
- 表面、皮膜および薄膜