Development of high-resolution MFM-tips

Michael Rudolf Koblischka; A. N. Müller; U. Hartmann; T. Sulzback; P. Dodd

doi:10.1109/INTMAG.2002.1001100

Development of high-resolution MFM-tips

Michael Rudolf Koblischka, A. N. Müller, U. Hartmann, T. Sulzback, P. Dodd

研究成果: Conference contribution

抄録

In this contribution, we report on the preparation of high-resolution MFM tips using the EBD-method for MFM measurements on soft magnetic samples. Electron beam lithography (EBL) using a scanning electron microscope (SEM) was used to define small particles of magnetic material at the very end of a commercial scanning microscope tip to achieve maximum lateral resolution with low magnetic moment.

本文言語	English
ホスト出版物のタイトル	INTERMAG Europe 2002 - IEEE International Magnetics Conference
編集者	J. Fidler, B. Hillebrands, C. Ross, D. Weller, L. Folks, E. Hill, M. Vazquez Villalabeitia, J. A. Bain, Jo De Boeck, R. Wood
出版社	Institute of Electrical and Electronics Engineers Inc.
ISBN（電子版）	0780373650, 9780780373655
DOI	https://doi.org/10.1109/INTMAG.2002.1001100
出版ステータス	Published - 2002 1 1
外部発表	はい
イベント	2002 IEEE International Magnetics Conference, INTERMAG Europe 2002 - Amsterdam, Netherlands 継続期間: 2002 4 28 → 2002 5 2

Other

Other	2002 IEEE International Magnetics Conference, INTERMAG Europe 2002
国/地域	Netherlands
City	Amsterdam
Period	02/4/28 → 02/5/2

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
電子工学および電気工学
表面、皮膜および薄膜

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10.1109/INTMAG.2002.1001100

他のファイルとリンク

引用スタイル

Koblischka, M. R., Müller, A. N., Hartmann, U., Sulzback, T., & Dodd, P. (2002). Development of high-resolution MFM-tips. In J. Fidler, B. Hillebrands, C. Ross, D. Weller, L. Folks, E. Hill, M. Vazquez Villalabeitia, J. A. Bain, J. De Boeck, & R. Wood (Eds.), INTERMAG Europe 2002 - IEEE International Magnetics Conference [1001100] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/INTMAG.2002.1001100

Development of high-resolution MFM-tips. / Koblischka, Michael Rudolf; Müller, A. N.; Hartmann, U.; Sulzback, T.; Dodd, P.

INTERMAG Europe 2002 - IEEE International Magnetics Conference. ed. / J. Fidler; B. Hillebrands; C. Ross; D. Weller; L. Folks; E. Hill; M. Vazquez Villalabeitia; J. A. Bain; Jo De Boeck; R. Wood. Institute of Electrical and Electronics Engineers Inc., 2002. 1001100.

研究成果: Conference contribution

Koblischka, MR, Müller, AN, Hartmann, U, Sulzback, T & Dodd, P 2002, Development of high-resolution MFM-tips. in J Fidler, B Hillebrands, C Ross, D Weller, L Folks, E Hill, M Vazquez Villalabeitia, JA Bain, J De Boeck & R Wood (eds), INTERMAG Europe 2002 - IEEE International Magnetics Conference., 1001100, Institute of Electrical and Electronics Engineers Inc., 2002 IEEE International Magnetics Conference, INTERMAG Europe 2002, Amsterdam, Netherlands, 02/4/28. https://doi.org/10.1109/INTMAG.2002.1001100

Koblischka MR, Müller AN, Hartmann U, Sulzback T, Dodd P. Development of high-resolution MFM-tips. In Fidler J, Hillebrands B, Ross C, Weller D, Folks L, Hill E, Vazquez Villalabeitia M, Bain JA, De Boeck J, Wood R, editors, INTERMAG Europe 2002 - IEEE International Magnetics Conference. Institute of Electrical and Electronics Engineers Inc. 2002. 1001100 https://doi.org/10.1109/INTMAG.2002.1001100

Koblischka, Michael Rudolf ; Müller, A. N. ; Hartmann, U. ; Sulzback, T. ; Dodd, P. / Development of high-resolution MFM-tips. INTERMAG Europe 2002 - IEEE International Magnetics Conference. editor / J. Fidler ; B. Hillebrands ; C. Ross ; D. Weller ; L. Folks ; E. Hill ; M. Vazquez Villalabeitia ; J. A. Bain ; Jo De Boeck ; R. Wood. Institute of Electrical and Electronics Engineers Inc., 2002.

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Development of high-resolution MFM-tips

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