Development of highly efficient micro energy harvesters with MgHf-codoped AlN piezoelectric films

Hung H. Nguyen, Le Van Minh, Hiroyuki Oguchi, Hiroki Kuwano

研究成果: Conference contribution

6 被引用数 (Scopus)

抄録

This paper presents the development of high power-density vibration micro energy harvesters (VEHs) exploiting MgHf-codoped AlN ((MgHf)xAl1-xN) piezoelectric films. The devices provided a significant improvement in performance of micro-energy harvesters. A normalized power density (NPD) of 34.9 mW.g-2.cm-3 was increased 18-fold than that of the best published AlN-based device. The devices in this study consisted of a (MgHf)xAl1-xN/Si cantilever and a W/Si proof-mass. Our piezoelectric films with MgHf dopant of χ = 0, 0.05, and 0.10 were grown successfully on Pt/Ti/SOI substrates by an ion-beam sputtering using an AlN and a MgHf targets in Ar/N2 ambient. The films offered a power-generation figure of merit (FoM) of 22 GPa, which is 3-fold larger than that of AlN. The results confirmed the high potential of (MgHf)xAl1-xN-based VEHs as power sources for wireless sensor networks (WSNs) crucial to realize Internet of Things (IoT).

本文言語English
ホスト出版物のタイトル2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
出版社Institute of Electrical and Electronics Engineers Inc.
ページ222-225
ページ数4
ISBN(電子版)9781538647820
DOI
出版ステータスPublished - 2018 4月 24
外部発表はい
イベント31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom
継続期間: 2018 1月 212018 1月 25

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2018-January
ISSN(印刷版)1084-6999

Conference

Conference31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
国/地域United Kingdom
CityBelfast
Period18/1/2118/1/25

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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