Development of Mechanically-Robust Piezoelectric Micromachined Ultrasonic Transducer (pMUT) with Island-Shaped PZT Monocrystalline Thin Film

Pham N. Thao; Shinya Yoshida; Shuji Tanaka

doi:10.1109/TRANSDUCERS.2019.8808654

Development of Mechanically-Robust Piezoelectric Micromachined Ultrasonic Transducer (pMUT) with Island-Shaped PZT Monocrystalline Thin Film

Pham N. Thao, Shinya Yoshida, Shuji Tanaka

研究成果: Conference contribution

3 被引用数 (Scopus)

抄録

In this study, we developed a mechanically-robust piezoelectric micromachined ultrasonic transducer (pMUT) based on a monocrystalline Pb(Zr, Ti)O₃ thin film (Mono-PZT). Mono-PZT has a high value of figure of merit (FOM) for pMUT. However, the mechanical fracture is often caused for a conventional-design pMUT during the resonant driving with a large displacement. That is perhaps due to its brittle property. For overcoming this problem, we proposed a new design: island-shaped Mono-PZT structure covered with a ring-shaped polyimide thin film. The fracture test proved that this design is effective for enhancing the mechanical robustness. This achievement has a great potential to create not only a higher-performance but also highly-reliable pMUT.

本文言語	English
ホスト出版物のタイトル	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	833-836
ページ数	4
ISBN（電子版）	9781728120072
DOI	https://doi.org/10.1109/TRANSDUCERS.2019.8808654
出版ステータス	Published - 2019 6月
外部発表	はい
イベント	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany 継続期間: 2019 6月 23 → 2019 6月 27

出版物シリーズ

名前	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
国/地域	Germany
City	Berlin
Period	19/6/23 → 19/6/27

ASJC Scopus subject areas

プロセス化学およびプロセス工学
分光学
電子工学および電気工学
機械工学
電子材料、光学材料、および磁性材料
制御と最適化
器械工学

文献へのアクセス

10.1109/TRANSDUCERS.2019.8808654

他のファイルとリンク

フィンガープリント

「Development of Mechanically-Robust Piezoelectric Micromachined Ultrasonic Transducer (pMUT) with Island-Shaped PZT Monocrystalline Thin Film」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル

Thao, P. N., Yoshida, S., & Tanaka, S. (2019). Development of Mechanically-Robust Piezoelectric Micromachined Ultrasonic Transducer (pMUT) with Island-Shaped PZT Monocrystalline Thin Film. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 833-836). [8808654] (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2019.8808654

Development of Mechanically-Robust Piezoelectric Micromachined Ultrasonic Transducer (pMUT) with Island-Shaped PZT Monocrystalline Thin Film. / Thao, Pham N.; Yoshida, Shinya; Tanaka, Shuji.

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. p. 833-836 8808654 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

研究成果: Conference contribution

Thao, PN, Yoshida, S & Tanaka, S 2019, Development of Mechanically-Robust Piezoelectric Micromachined Ultrasonic Transducer (pMUT) with Island-Shaped PZT Monocrystalline Thin Film. in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII., 8808654, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Institute of Electrical and Electronics Engineers Inc., pp. 833-836, 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Berlin, Germany, 19/6/23. https://doi.org/10.1109/TRANSDUCERS.2019.8808654

Thao PN, Yoshida S, Tanaka S. Development of Mechanically-Robust Piezoelectric Micromachined Ultrasonic Transducer (pMUT) with Island-Shaped PZT Monocrystalline Thin Film. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc. 2019. p. 833-836. 8808654. (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). doi: 10.1109/TRANSDUCERS.2019.8808654

Thao, Pham N. ; Yoshida, Shinya ; Tanaka, Shuji. / Development of Mechanically-Robust Piezoelectric Micromachined Ultrasonic Transducer (pMUT) with Island-Shaped PZT Monocrystalline Thin Film. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 833-836 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

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abstract = "In this study, we developed a mechanically-robust piezoelectric micromachined ultrasonic transducer (pMUT) based on a monocrystalline Pb(Zr, Ti)O3 thin film (Mono-PZT). Mono-PZT has a high value of figure of merit (FOM) for pMUT. However, the mechanical fracture is often caused for a conventional-design pMUT during the resonant driving with a large displacement. That is perhaps due to its brittle property. For overcoming this problem, we proposed a new design: island-shaped Mono-PZT structure covered with a ring-shaped polyimide thin film. The fracture test proved that this design is effective for enhancing the mechanical robustness. This achievement has a great potential to create not only a higher-performance but also highly-reliable pMUT.",

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