Dielectric and electrical properties of amorphous La1-XTaXOY films as higher-k gate insulators

Y.Zhao Y.Zhao, K.Kita K.Kita, K.Kyuno K.Kyuno, A.Toriumi A.Toriumi, Kentaro Kyuno

研究成果: Article › 査読

引用スタイル

@article{cf23559243d64bbc9b6d7c1f1fe25a1d,

title = "Dielectric and electrical properties of amorphous La1-XTaXOY films as higher-k gate insulators",

author = "Y.Zhao Y.Zhao and K.Kita K.Kita and K.Kyuno K.Kyuno and A.Toriumi A.Toriumi and Kentaro Kyuno",

year = "2009",

month = mar,

day = "1",

language = "English",

volume = "105",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics Publising LLC",

}