Direct bonding between quaternary compound semiconductor and garnet crystals for integrated optical isolator

Hideki Yokoi, Tetsuya Mizumoto, Masafumi Shimizu, Naoki Futakuchi, Noriaki Kaida, Yoshiaki Nakano

研究成果: Article査読

7 被引用数 (Scopus)

抄録

An integrated optical isolator employing a nonreciprocal phase shift is very attractive because it does not need phase matching. We have investigated a novel configuration of the integrated optical isolator, employing the nonreciprocal phase shift, in which the magnetooptic waveguide has a magnetic garnet/GalnAsP/InP structure. The wafer direct bonding technique is necessary to realize this structure. The direct bonding between quaternary III-V compound semiconductors and garnet crystals was experimentally studied. The bonding was achieved by chemical treatment and subsequent heat treatment at temperatures ranging from 110 to 330°C. Cross-sectional scanning electron microscope (SEM) images indicated that there were no gaps between the two wafers in contact.

本文言語English
ページ(範囲)195-197
ページ数3
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
38
1
DOI
出版ステータスPublished - 1999 1 1
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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