Direct etching and implanted metalization in soft matter

K. Ichikawa, Y. Fukuyama, S. Maeda, Y. Yamanishi

研究成果: Conference contribution

抄録

We have successfully carried out direct implantable metallization (plating) on soft polymer such as PDMS using electrically induced microbubbles. Novelties of this technology is; 1. No requirement of complicated pretreatment procedure on the surface of any substrate before plating and which is unlike the non-electrolytic plating, 2. Resolution of the plating can be reached to several-tens micron within short time with low cost, 3. Robust metallization on wide range of material locally and precisely without any masks and so on. We evaluated robustness and resolution of metallization in our method.

本文言語English
ホスト出版物のタイトル21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017
出版社Chemical and Biological Microsystems Society
ページ421-422
ページ数2
ISBN(電子版)9780692941836
出版ステータスPublished - 2020
イベント21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017 - Savannah, United States
継続期間: 2017 10 222017 10 26

出版物シリーズ

名前21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017

Conference

Conference21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017
国/地域United States
CitySavannah
Period17/10/2217/10/26

ASJC Scopus subject areas

  • 化学工学(その他)
  • バイオエンジニアリング

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