The piezoelectric actuators (PEAs) with many advantages such as sub-nanometers resolution, low power consumption, quick response, high stiffness, etc., have been widely used in micro/nano positioning systems which play a very important role in many key technologies recently. To achieve high precision in tracking applications based on PEAs, advanced control techniques are needed to cope with the nonlinearity exhibiting between the input voltage and output displacement of the PEAs. This paper proposes a new approach to get high tracking performance by combining discrete-time quasi-sliding mode control (DQSMC) and prescribed performance control (PPC) techniques. The effectiveness of the proposed method is verified by experiments on a piezo-actuated positioning system.
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