Effect of Current on Ni Catalyst Layer Used for Current-Enhanced CVD of Multilayer Graphene

Jumpei Tokida, Reno Hasumi, Kazuyoshi Ueno

研究成果: Conference contribution

抄録

Current application was found to enhance the crystallinity of multilayer graphene during CVD using a Ni catalyst layer. However, the reduction of surface roughness has been the issue. The effect of current to the Ni catalyst layer was investigated, and it was found that the current promotes the growth of Ni (111) grains, leading to the enhanced compressive stress. After reaching the stress limit, the Ni microstructure changed again and the stress was relaxed. Such microstructure changes in the Ni film correlated with the surface roughness.

本文言語English
ホスト出版物のタイトル2022 IEEE International Interconnect Technology Conference, IITC 2022
出版社Institute of Electrical and Electronics Engineers Inc.
ページ85-86
ページ数2
ISBN(電子版)9781665486460
DOI
出版ステータスPublished - 2022
イベント2022 IEEE International Interconnect Technology Conference, IITC 2022 - San Jose, United States
継続期間: 2022 6月 272022 6月 30

出版物シリーズ

名前2022 IEEE International Interconnect Technology Conference, IITC 2022

Conference

Conference2022 IEEE International Interconnect Technology Conference, IITC 2022
国/地域United States
CitySan Jose
Period22/6/2722/6/30

ASJC Scopus subject areas

  • ハードウェアとアーキテクチャ
  • 電子工学および電気工学
  • 安全性、リスク、信頼性、品質管理
  • 電子材料、光学材料、および磁性材料

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