Effect of grain size on Bi4Ti3O12 thin film properties

Masaki Yamaguchi, Takao Nagatomo

研究成果: Article査読

32 被引用数 (Scopus)

抄録

Bismuth titanate (Bi4Ti3O12) thin films with a c-axis orientation were prepared on (100) silicon wafers by rf magnetron sputtering. The average grain size and the c-axis lattice constant depend on the substrate temperature. The c-axis lattice constant was decreased with increasing grain size. The leakage current characteristics of the Bi4Ti3O12 thin film consisting of small grains with a closely packed structure, are superior to those of others. The apparent remanent polarization and the apparent coercive field of the film with small grain sizes were estimated to be 2.4 μC·cm-2 and 2.3 kV·cm-1, respectively. The refractive index dispersion characteristics for the film show that the large grains increase the distortion of the oxygen-octahedra. Consequently, this result indicates that the small grain size of Bi4Ti3O12 thin films can improve the ferroelectric properties.

本文言語English
ページ(範囲)5166-5170
ページ数5
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
37
9 PART B
DOI
出版ステータスPublished - 1998 9月

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

フィンガープリント

「Effect of grain size on Bi4Ti3O12 thin film properties」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル