Effect of pulse bias voltage and nitrogen pressure on nitrogen distribution in steel substrate by plasma immersion ion implantation of nitrogen

Engineering & Materials Science

• Ion implantation 100%
• Bias voltage 92%
• Nitrogen 68%
• Plasmas 68%
• Substrates 52%
• Steel 42%
• Auger electron spectroscopy 12%
• Diffractometers 11%
• Nitrides 9%
• Tool steel 9%
• Low carbon steel 9%
• Ions 7%
• X rays 7%
• Temperature 6%
• Hardness 6%

Physics & Astronomy

• submerging 75%
• ion implantation 67%
• steels 54%
• nitrogen 54%
• electric potential 39%
• pulses 36%
• low carbon steels 11%
• nitrogen ions 11%
• diffractometers 10%
• Auger spectroscopy 9%
• electron spectroscopy 8%
• nitrides 8%
• hardness 7%
• temperature 5%
• profiles 5%
• x rays 4%

Chemical Compounds

• Ion Implantation 90%
• Voltage 53%
• Plasma 45%
• Nitrogen 44%
• Pressure 42%
• Auger Electron Spectroscopy 11%
• Nitride 10%
• Surface 6%
• X-Ray 6%
• Ion 4%