Effect of refractive index-mismatch on laser microfabrication in silica glass

A. Marcinkevičius, V. Mizeikis, S. Juodkazis, Shigeki Matsuo, H. Misawa

研究成果: Article

86 引用 (Scopus)

抄録

We studied the peculiarities of femtosecond laser microfabrication in silica glass with a refractive index that did not exactly match the value for which the focusing optics is designed. Spherical aberrations resulting from a small refractive index mismatch were found to increase the size and distort the shape of photodamaged regions, thus reducing the spatial resolution of the microfabrication. However, these undesirable effects can be minimized, providing that the focusing depth inside the glass is not too large, and the laser intensity is kept close to the light-induced damage threshold.

元の言語English
ページ(範囲)257-260
ページ数4
ジャーナルApplied Physics A: Materials Science and Processing
76
発行部数2
DOI
出版物ステータスPublished - 2003 2
外部発表Yes

Fingerprint

Microfabrication
silica glass
Fused silica
Refractive index
refractivity
Lasers
yield point
Ultrashort pulses
Aberrations
lasers
aberration
Optics
spatial resolution
optics
Glass
glass

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)

これを引用

Effect of refractive index-mismatch on laser microfabrication in silica glass. / Marcinkevičius, A.; Mizeikis, V.; Juodkazis, S.; Matsuo, Shigeki; Misawa, H.

:: Applied Physics A: Materials Science and Processing, 巻 76, 番号 2, 02.2003, p. 257-260.

研究成果: Article

Marcinkevičius, A. ; Mizeikis, V. ; Juodkazis, S. ; Matsuo, Shigeki ; Misawa, H. / Effect of refractive index-mismatch on laser microfabrication in silica glass. :: Applied Physics A: Materials Science and Processing. 2003 ; 巻 76, 番号 2. pp. 257-260.
@article{43510dc4d2d84f7abd657f1800c99f97,
title = "Effect of refractive index-mismatch on laser microfabrication in silica glass",
abstract = "We studied the peculiarities of femtosecond laser microfabrication in silica glass with a refractive index that did not exactly match the value for which the focusing optics is designed. Spherical aberrations resulting from a small refractive index mismatch were found to increase the size and distort the shape of photodamaged regions, thus reducing the spatial resolution of the microfabrication. However, these undesirable effects can be minimized, providing that the focusing depth inside the glass is not too large, and the laser intensity is kept close to the light-induced damage threshold.",
author = "A. Marcinkevičius and V. Mizeikis and S. Juodkazis and Shigeki Matsuo and H. Misawa",
year = "2003",
month = "2",
doi = "10.1007/s00339-002-1447-z",
language = "English",
volume = "76",
pages = "257--260",
journal = "Applied Physics",
issn = "0340-3793",
publisher = "Springer Heidelberg",
number = "2",

}

TY - JOUR

T1 - Effect of refractive index-mismatch on laser microfabrication in silica glass

AU - Marcinkevičius, A.

AU - Mizeikis, V.

AU - Juodkazis, S.

AU - Matsuo, Shigeki

AU - Misawa, H.

PY - 2003/2

Y1 - 2003/2

N2 - We studied the peculiarities of femtosecond laser microfabrication in silica glass with a refractive index that did not exactly match the value for which the focusing optics is designed. Spherical aberrations resulting from a small refractive index mismatch were found to increase the size and distort the shape of photodamaged regions, thus reducing the spatial resolution of the microfabrication. However, these undesirable effects can be minimized, providing that the focusing depth inside the glass is not too large, and the laser intensity is kept close to the light-induced damage threshold.

AB - We studied the peculiarities of femtosecond laser microfabrication in silica glass with a refractive index that did not exactly match the value for which the focusing optics is designed. Spherical aberrations resulting from a small refractive index mismatch were found to increase the size and distort the shape of photodamaged regions, thus reducing the spatial resolution of the microfabrication. However, these undesirable effects can be minimized, providing that the focusing depth inside the glass is not too large, and the laser intensity is kept close to the light-induced damage threshold.

UR - http://www.scopus.com/inward/record.url?scp=0037290915&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0037290915&partnerID=8YFLogxK

U2 - 10.1007/s00339-002-1447-z

DO - 10.1007/s00339-002-1447-z

M3 - Article

AN - SCOPUS:0037290915

VL - 76

SP - 257

EP - 260

JO - Applied Physics

JF - Applied Physics

SN - 0340-3793

IS - 2

ER -