Effect of surface roughening on femtosecond laser-induced ripple structures

Takuro Tomita, Keita Kinoshita, Shigeki Matsuo, Shuichi Hashimoto

研究成果: Article査読

118 被引用数 (Scopus)

抄録

The effect of surface roughness was studied on the formation of femtosecond laser-induced ripple structures for 4H-SiC. Of the two types of ripple structures, fine and coarse, the threshold fluence for the formation of the fine ripple was remarkably reduced on the surface roughened by intentional rubbing, while the threshold for the formation of the coarse ripple was not affected. The result suggests that the initial surface roughness plays a significant role only for the formation of fine ripples. A brief explanation will be given on the qualitative basis for the specific effect of surface morphology to the fine ripple formation.

本文言語English
論文番号153115
ジャーナルApplied Physics Letters
90
15
DOI
出版ステータスPublished - 2007
外部発表はい

ASJC Scopus subject areas

  • 物理学および天文学(その他)

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