Effects of indium incorporation on the optical properties of ZnO films

Yongge Cao, Lei Miao, Sakae Tanemura, Yasuhiko Hayashi, Masaki Tanemura

研究成果: Conference contribution

4 被引用数 (Scopus)

抄録

Transparent indium-doped ZnO (IZO) films with low In content (<6at%) were fabricated through radio-frequency (rf) helicon magnetron sputtering. Formation of In-Zn-O solid solution was confirmed by X-ray diffraction (XRD) patterns. Incorporation of indium into ZnO films enhances the optical transmission in the visible wavelength. The optical band-gaps slightly increase from 3.25eV (ZnO) to 3.28eV (In0.04Zn0.96O) and to 3.30eV (In0.06Zn0.94O) due to Burstain-Moss effect. The Urbach tail parameter E0, which is believed to be a function of structural disorder, increases from 79meV (ZnO), to 146meV (In0.04Zn0.96O), and to 173meV (In0.06Zn0.94O), which is consistent with increase of Full-Width Half-Maximum (FWHM) in corresponding XRD patterns. Decreasing in crystal quality with increasing indium concentration is also confirmed by photoluminescence spectra.

本文言語English
ホスト出版物のタイトルAICAM 2005 - Proceedings of the Asian International Conference on Advanced Materials
出版社Trans Tech Publications
ページ159-162
ページ数4
ISBN(印刷版)0878499792, 9780878499793
DOI
出版ステータスPublished - 2006
外部発表はい
イベントAICAM 2005 - Asian International Conference on Advanced Materials - Beijing, China
継続期間: 2005 11 32005 11 5

出版物シリーズ

名前Advanced Materials Research
11-12
ISSN(印刷版)1022-6680

Conference

ConferenceAICAM 2005 - Asian International Conference on Advanced Materials
国/地域China
CityBeijing
Period05/11/305/11/5

ASJC Scopus subject areas

  • 工学(全般)

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