Electroless NiB Liner on Organosilane Layers

H. Aramaki, M. Yoshino, I. Matsuda, K. Ueno, Y. Shacham-Diam, T. Osaka

研究成果: Article

元の言語English
ページ(範囲)108-109
ジャーナルAdvanced Metallization Conference 2008, Asian Session Abstracts
出版物ステータスPublished - 2008 10 8

これを引用

Aramaki, H., Yoshino, M., Matsuda, I., Ueno, K., Shacham-Diam, Y., & Osaka, T. (2008). Electroless NiB Liner on Organosilane Layers. Advanced Metallization Conference 2008, Asian Session Abstracts, 108-109.