Electron-beam-induced deposition of Fe nanoparticles and thin films on SrTiO3 substrates

Miyoko Tanaka, Kazutaka Mitsuishi, Masaki Takeguchi, Masayuki Shimojo, Kazuo Furuya, Nobuyuki Koguchi

研究成果: Article

2 被引用数 (Scopus)

抄録

We performed electron-beam-induced deposition (EBID) of Fe(CO)5 on cleaned Nb-doped SrTiO3(100) substrates at 673-873 K inside an ultrahigh vacuum transmission electron microscopy (UHV-TEM) system. When the substrate temperature is maintained at 673-723 K, broad-beam irradiation resulted in the fabrication of Fe nanoparticles that subsequently grew into a polycrystalline a-Fe film. Focused-beam irradiation was successful only at the beginning of the beam irradiation due to the charging up of the substrates. Deposition did not occur when the substrate temperature was increased to 773-873 K.

本文言語English
ページ(範囲)6243-6246
ページ数4
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
46
9 B
DOI
出版ステータスPublished - 2007 9 20
外部発表はい

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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