We performed electron-beam-induced deposition (EBID) of Fe(CO)5 on cleaned Nb-doped SrTiO3(100) substrates at 673-873 K inside an ultrahigh vacuum transmission electron microscopy (UHV-TEM) system. When the substrate temperature is maintained at 673-723 K, broad-beam irradiation resulted in the fabrication of Fe nanoparticles that subsequently grew into a polycrystalline a-Fe film. Focused-beam irradiation was successful only at the beginning of the beam irradiation due to the charging up of the substrates. Deposition did not occur when the substrate temperature was increased to 773-873 K.
|ジャーナル||Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers|
|出版ステータス||Published - 2007 9 20|
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