Electron beam induced deposition of position and size controlled structures on the nanometre scale

K. Furuya, K. Mitsuishi, M. Shimojo, M. Song, M. Tanaka, M. Takeguchi

研究成果: Article

元の言語English
ページ(範囲)239-242
ジャーナルSpringer Proceedings in Physics
vol. 107
出版物ステータスPublished - 2006 1 1

これを引用

Furuya, K., Mitsuishi, K., Shimojo, M., Song, M., Tanaka, M., & Takeguchi, M. (2006). Electron beam induced deposition of position and size controlled structures on the nanometre scale. Springer Proceedings in Physics, vol. 107, 239-242.